High Performance,
Wide Bandwidth Accelerometer
ADXL001
Rev. A
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responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other
rights of third parties that may result from its use. Specifications subject to change without notice. No
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Tel: 781.329.4700 www.analog.com
Fax: 781.461.3113 ©2010 Analog Devices, Inc. All rights reserved.
FEATURES
High performance accelerometer
±70 g, ±250 g, and ±500 g wideband ranges available
22 kHz resonant frequency structure
High linearity: 0.2% of full scale
Low noise: 4 mg/√Hz
Sensitive axis in the plane of the chip
Frequency response down to dc
Full differential signal processing
High resistance to EMI/RFI
Complete electromechanical self-test
Output ratiometric to supply
Velocity preservation during acceleration input overload
Low power consumption: 2.5 mA typical
8-terminal, hermetic ceramic, LCC package
APPLICATIONS
Vibration monitoring
Shock detection
Sports diagnostic equipment
Medical instrumentation
Industrial monitoring
GENERAL DESCRIPTION
The ADXL001 is a major advance over previous generations of
accelerometers providing high performance and wide bandwidth.
This part is ideal for industrial, medical, and military applications
where wide bandwidth, small size, low power, and robust
performance are essential.
Using the Analog Devices, Inc. proprietary fifth-generation
iMEMs® process enables the ADXL001 to provide the desired
dynamic range that extends from ±70 g to ±500 g in combin-
ation with 22 kHz of bandwidth. The accelerometer output
channel passes through a wide bandwidth differential-to-single-
ended converter, which allows access to the full mechanical
performance of the sensor.
The part can operate on voltage supplies from 3.3 V to 5 V.
The ADXL001 also has a self-test (ST) pin that can be asserted to
verify the full electromechanical signal chain for the accelerometer
channel.
The ADXL001 is available in the industry-standard 8-terminal
LCC and is rated to work over the extended industrial temperature
range (−40°C to +125°C).
–15
–12
–9
–6
–3
0
3
6
9
12
15
1 10 100 1k 10k 100k
RESPONSE ( dB)
FREQUENCY (Hz)
07510-102
Figure 1. Sensor Frequency Response
FUNCTIONAL BLOCK DIAGRAM
TIMING
GENERATOR
ADXL001
XOUT
DIFFERENTIAL
SENSOR
MOD DEMOD
AMP
SELF-TEST
ST COM
OUTPUT
AMPLIFIER
V
S
VDD
VDD2
07510-001
Figure 2.
ADXL001
Rev. A | Page 2 of 16
TABLE OF CONTENTS
Features .............................................................................................. 1
Applications ....................................................................................... 1
General Description ......................................................................... 1
Functional Block Diagram .............................................................. 1
Revision History ............................................................................... 2
Specifications ..................................................................................... 3
Specifications for 3.3 V Operation ............................................. 3
Specifications for 5 V Operation ................................................ 4
Recommended Soldering Profile ............................................... 5
Absolute Maximum Ratings ............................................................ 6
ESD Caution .................................................................................. 6
Pin Configuration and Function Descriptions ............................. 7
Typical Performance Characteristics ............................................. 8
Theory of Operation ...................................................................... 11
Design Principles ........................................................................ 11
Mechanical Sensor ..................................................................... 11
Applications Information .............................................................. 12
Application Circuit ..................................................................... 12
Self-Test ....................................................................................... 12
Acceleration Sensitive Axis ....................................................... 12
Operating Voltages Other Than 5 V ........................................ 12
Layout, Grounding, and Bypassing Considerations .................. 13
Clock Frequency Supply Response .......................................... 13
Power Supply Decoupling ......................................................... 13
Electromagnetic Interference ................................................... 13
Outline Dimensions ....................................................................... 14
Ordering Guide .......................................................................... 14
REVISION HISTORY
2/10—Rev. 0 to Rev. A
Added -250 and -500 models ............................................ Universal
Changes to Table 1 ............................................................................ 3
Changes to Table 2 ............................................................................ 4
Added Figure 9 through Figure 18 ................................................. 8
Changes to Ordering Guide .......................................................... 14
1/09—Revision 0: Initial Version
ADXL001
Rev. A | Page 3 of 16
SPECIFICATIONS
SPECIFICATIONS FOR 3.3 V OPERATION
TA = −40°C to +125°C, VS = 3.3 V ± 5% dc, acceleration = 0 g, unless otherwise noted.
Table 1.
ADXL001-70 ADXL001-250 ADXL001-500
Parameter Conditions Min Typ Max Min Typ Max Min Typ Max Unit
SENSOR
Nonlinearity 0.2 2 0.2 2 0.2 2 %
Cross-Axis Sensitivity Includes package
alignment
2 2 2 %
Resonant Frequency 22 22 22 kHz
Quality Factor 2.5 2.5 2.5
SENSITIVITY
Full-Scale Range IOUT ≤ ±100 μA −70 +70 −250 +250 −500 +500 g
Sensitivity 100 Hz 16.0 4.4 2.2 mV/g
OFFSET Ratiometric
Zero-g Output 1.35 1.65 1.95 1.35 1.65 1.95 1.35 1.65 1.95 V
NOISE
Noise 10 Hz to 400 Hz 85 95 105 mg rms
Noise Density 10 Hz to 400 Hz 3.3 3.65 4.25 mg/√Hz
FREQUENCY RESPONSE
−3 dB Frequency 32 32 32 kHz
−3 dB Frequency Drift
Over Temperature
2 2 2 %
SELF-TEST
Output Voltage Change 400 125 62 mV
Logic Input High 2.1 2.1 2.1 V
Logic Input Low 0.66 0.66 0.66 V
Input Resistance To ground 30 50 30 50 30 50 kΩ
OUTPUT AMPLIFIER
Output Swing IOUT = ±100 μA 0.2 VS − 0.2 0.2 VS − 0.2 0.2 VS − 0.2 V
Capacitive Load 1000 1000 1000 pF
PSRR (CFSR) DC to 1 MHz 0.9 0.9 0.9 V/V
POWER SUPPLY (VS)
Functional Range 3.135 6 3.135 6 3.135 6 V
ISUPPLY 2.5 5 2.5 5 2.5 5 mA
Turn-On Time 10 10 10 ms
ADXL001
Rev. A | Page 4 of 16
SPECIFICATIONS FOR 5 V OPERATION
TA = -40°C to +125°C, VS = 5 V ± 5% dc, acceleration = 0 g, unless otherwise noted.
Table 2.
ADXL001-70 ADXL001-250 ADXL001-500
Parameter Conditions Min Typ Max Min Typ Max Min Typ Max Unit
SENSOR
Nonlinearity 0.2 2 0.2 2 0.2 2 %
Cross-Axis Sensitivity Includes package
alignment
2 2 2 %
Resonant Frequency 22 22 22 kHz
Quality Factor 2.5 2.5 2.5
SENSITIVITY
Full-Scale Range IOUT ≤ ±100 μA −70 +70 −250 +250 −500 +500 g
Sensitivity 100 Hz 24.2 6.7 3.3 mV/g
OFFSET Ratiometric
Zero-g Output 2.00 2.5 3.00 2.00 2.5 3.00 2.00 2.5 3.00 V
NOISE
Noise 10 Hz to 400 Hz 55 60 70 mg rms
Noise Density 10 Hz to 400 Hz 2.15 2.35 2.76 mg/√Hz
FREQUENCY RESPONSE
−3 dB Frequency 32 32 32 kHz
−3 dB Frequency Drift
Over Temperature
2 2 2 %
SELF-TEST
Output Voltage Change 1435 445 217 mV
Logic Input High 3.3 3.3 3.3 V
Logic Input Low 0.66 0.66 0.66 V
Input Resistance To ground 30 50 30 50 30 50 kΩ
OUTPUT AMPLIFIER
Output Swing IOUT = ±100 μA 0.2 VS − 0.2 0.2 VS − 0.2 0.2 VS − 0.2 V
Capacitive Load 1000 1000 1000 pF
PSRR (CFSR) DC to 1 MHz 0.9 0.9 0.9 V/V
POWER SUPPLY (VS)
Functional Range 3.135 6 3.135 6 3.135 6 V
ISUPPLY 4.5 9 4.5 9 4.5 9 mA
Turn-On Time 10 10 10 ms
ADXL001
Rev. A | Page 5 of 16
RECOMMENDED SOLDERING PROFILE
Table 3. Soldering Profile Parameters
Profile Feature Sn63/Pb37 Pb-Free
Average Ramp Rate (TL to TP) 3°C/sec maximum 3°C/sec maximum
Preheat
Minimum Temperature (TSMIN) 100°C 150°C
Maximum Temperature (TSMAX) 150°C 200°C
Time (TSMIN to TSMAX), ts 60 sec to 120 sec 60 sec to 150 sec
TSMAX to TL
Ramp-Up Rate 3°C/sec 3°C/sec
Time Maintained Above Liquidous (tL)
Liquidous Temperature (TL) 183°C 217°C
Liquidous Time (tL) 60 sec to 150 sec 60 sec to 150 sec
Peak Temperature (TP) 240°C + 0°C/−5°C 260°C + 0°C/−5°C
Time Within 5°C of Actual Peak Temperature (tP) 10 sec to 30 sec 20 sec to 40 sec
Ramp-Down Rate 6°C/sec maximum 6°C/sec maximum
Time 25°C to Peak Temperature (tPEAK) 6 minute maximum 8 minute maximum
Soldering Profile Diagram
t
P
t
L
t
PEAK
t
S
PREHEAT
CRITICAL ZO NE
T
L
TO T
P
TEM P ERATURE (T)
TIME (t)
RAMP-DOWN
RAMP-UP
T
SMIN
T
SMAX
T
P
T
L
07510-022
Figure 3. Soldering Profile Diagram
ADXL001
Rev. A | Page 6 of 16
ABSOLUTE MAXIMUM RATINGS
Table 4.
Parameter Rating
Acceleration (Any Axis, Unpowered and
Powered)
4000 g
Supply Voltage, VS −0.3 V to +7.0 V
Output Short-Circuit Duration (VOUT to GND) Indefinite
Storage Temperature Range −65°C to +150°C
Operating Temperature Range −55°C to +125°C
Soldering Temperature (Soldering, 10 sec) 245°C
Drops onto hard surfaces can cause shocks of greater than
4000 g and can exceed the absolute maximum rating of the
device. Exercise care during handling to avoid damage.
ESD CAUTION
Stresses above those listed under Absolute Maximum Ratings
may cause permanent damage to the device. This is a stress
rating only; functional operation of the device at these or any
other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.
ADXL001
Rev. A | Page 7 of 16
PIN CONFIGURATION AND FUNCTION DESCRIPTIONS
1
2
34
8
5
6
7
DNC
DNC
COM
V
DD2
ST
ADXL001
TOP V IEW
(Not to Scale)
DNC = DO NOT CONNECT
V
DD
X
OUT
DNC
07510-004
Figure 4. Pin Configuration
Table 5. Pin Function Descriptions
Pin No. Mnemonic Description
1, 2, 5 DNC Do Not Connect.
3 COM Common.
4 ST Self-Test Control (Logic Input).
6 XOUT X-Axis Acceleration Output.
7 VDD 3.135 V to 6 V. Connect to VDD2.
8 VDD2 3.135 V to 6 V. Connect to VDD.
ADXL001
Rev. A | Page 8 of 16
TYPICAL PERFORMANCE CHARACTERISTICS
VS = 3.3 V, TA = 25°C, unless otherwise noted.
07510-005
PERCENT OF POPUL AT ION
VOLTS
10
0
20
30
40
50
60
–0.07
–0.06
–0.05
–0.04
–0.03
–0.02
–0.01
0
0.01
0.02
0.03
0.04
0.05
0.06
0.07
Figure 5. Zero-g Bias Deviation from Ideal
07510-006
PERCENT OF POPUL AT ION
VOLTS
5
0
10
15
25
35
45
20
30
40
–0.07
–0.06
–0.05
–0.04
–0.03
–0.02
–0.01
0
0.01
0.02
0.03
0.04
0.05
0.06
0.07
Figure 6. Zero-g Bias Deviation from Ideal (TA = 125°C)
07510-007
PERCENT O F PO P UL AT I O N
(mV/g)
5
0
10
15
20
25
15.2
15.3
15.4
15.5
15.6
15.7
15.8
16.0
15.9
16.1
16.2
16.3
16.4
16.6
16.8
16.5
16.7
Figure 7. ADXL001-70, Sensitivity Distribution
07510-008
PERCENT OF PO PULATION
(mV/g)
5
0
10
15
20
25
15.2
15.3
15.4
15.5
15.6
15.7
15.8
16.0
15.9
16.1
16.2
16.3
16.4
16.6
16.8
16.5
16.7
Figure 8. ADXL001-70, Sensitivity Distribution (TA = 125°C)
07510-024
PERCENT O F PO P UL AT I O N
5
0
10
20
25
35
15
30
4.30
4.32
4.34
4.36
4.38
4.40
4.42
4.44
4.46
4.48
4.50
4.52
4.54
(mV/g)
Figure 9: ADXL001-250, Sensitivity Distribution
07510-025
PERCENT OF PO PULATION
5
0
10
20
25
15
30
4.30
4.32
4.34
4.36
4.38
4.40
4.42
4.44
4.46
4.48
4.50
4.52
4.56
4.54
(mV/g)
Figure 10: ADXL001-250, Sensitivity Distribution (TA = 125°C)
ADXL001
Rev. A | Page 9 of 16
07510-026
PERCENT OF PO PULATION
5
0
10
20
25
15
30
(mV/g)
2.17
2.18
2.19
2.20
2.21
2.22
2.23
2.24
2.25
2.26
2.27
Figure 11. ADXL001-500, Sensitivity Distribution
07510-027
PERCENT OF PO PULATION
5
0
10
20
25
15
30
(mV/g)
2.17
2.18
2.19
2.20
2.21
2.22
2.23
2.24
2.25
2.26
2.28
2.27
2.29
Figure 12. ADXL001-500, Sensitivity Distribution (TA = 125°C)
07510-009
PERCENT O F PO P UL AT I O N
(mV)
5
0
10
15
20
25
360
365
370
375
380
385
390
400
395
405
410
415
420
430
440
425
435
Figure 13. ADXL001-70, Self-Test Delta
07510-028
PERCENT OF PO PULATION
(mV)
5
0
10
15
25
20
30
110
112
114
116
118
120
122
126
124
128
130
132
134
138
142
136
140
Figure 14. ADXL001-250, Self-Test Delta
07510-029
PERCENT OF PO PULATIO N
(mV)
5
0
10
15
30
20
40
25
35
55 56 57 58 59 60 61 62 63 64 65 66 67
Figure 15. ADXL001-500, Self-Test Delta
07510-010
PERCENT O F PO P UL AT I O N
(mA)
5
0
10
15
25
20
30
2.000
2.075
2.150
2.225
2.300
2.375
2.450
2.600
2.525
2.675
2.750
2.825
2.900
Figure 16. ISUPPLY Distribution
ADXL001
Rev. A | Page 10 of 16
07510-011
PERCENT OF POPULATION
(mA)
5
0
10
15
35
25
30
20
40
2.100
2.175
2.250
2.325
2.400
2.475
2.550
2.700
2.625
2.775
2.850
2.925
3.000
Figure 17. ISUPPLY at 125°C
07510-012
CH1 500mV BWCH2 500mV BWM 10.0µ s A CH2 1.38V
T 42.80%
Figure 18. Turn-On Characteristic (10 μs per DIV)
ADXL001
Rev. A | Page 11 of 16
THEORY OF OPERATION
DESIGN PRINCIPLES
The ADXL001 accelerometer provides a fully differential sensor
structure and circuit path for excellent resistance to EMI/RFI
interference.
This latest generation SOI MEMS device takes advantage
of mechanically coupled but electrically isolated differential
sensing cells. This improves sensor performance and size
because a single proof mass generates the fully differential
signal. The sensor signal conditioning also uses electrical
feedback with zero-force feedback for improved accuracy
and stability. This force feedback cancels out the electrostatic
forces contributed by the sensor circuitry.
Figure 19 is a simplified view of one of the differential sensor
cell blocks. Each sensor block includes several differential
capacitor unit cells. Each cell is composed of fixed plates attached
to the device layer and movable plates attached to the sensor
frame. Displacement of the sensor frame changes the differential
capacitance. On-chip circuitry measures the capacitive change.
MECHANICAL SENSOR
The ADXL001 is built using the Analog Devices SOI MEMS
sensor process. The sensor device is micromachined in-plane
in the SOI device layer. Trench isolation is used to electrically
isolate, but mechanically couple, the differential sensing elements.
Single-crystal silicon springs suspend the structure over the
handle wafer and provide resistance against acceleration forces.
UNIT
SENSING
CELL
MOVABLE
FRAME
FIXED
PLATES
UNIT
FORCING
CELL
ANCHOR
MOVING
PLATE
PLATE
CAPACITORS
ACCELERATION
ANCHOR
07510-019
Figure 19. Simplified View of Sensor Under Acceleration
ADXL001
Rev. A | Page 12 of 16
APPLICATIONS INFORMATION
APPLICATION CIRCUIT
Figure 20 shows the standard application circuit for the ADXL001.
Note that VDD and VDD2 should always be connected together.
The output is shown connected to a 1000 pF output capacitor
for improved EMI performance and can be connected directly
to an ADC input. Use standard best practices for interfacing
with an ADC and do not omit an appropriate antialiasing filter.
7
6
5
4
8
3
2
1
DNC
DNC
COM
VDD2
ST
ST
TOP VIEW
(Not to Scale)
VDD
XOUT
DNC
ADXL001
CVDD
0.1µF
V
S
XOUT
COUT
1nF
DNC = DO NOT CONNECT
07510-023
Figure 20. Application Circuit
SELF-TEST
The fixed fingers in the forcing cells are normally kept at the
same potential as that of the movable frame. When the digital
self-test input is activated, the ADXL001 changes the voltage on
the fixed fingers in these forcing cells on one side of the moving
plate. This potential creates an attractive electrostatic force, causing
the sensor to move toward those fixed fingers. The entire signal
channel is active; therefore, the sensor displacement causes a
change in XOUT. The ADXL001 self-test function verifies proper
operation of the sensor, interface electronics, and accelerometer
channel electronics.
Do not expose the ST pin to voltages greater than VS + 0.3 V. If
this cannot be guaranteed due to the system design (for instance, if
there are multiple supply voltages), then a low VF clamping
diode between ST and VS is recommended.
ACCELERATION SENSITIVE AXIS
The ADXL001 is an x-axis acceleration and vibration-sensing
device. It produces a positive-going output voltage for vibration
toward its Pin 8 marking.
PIN 8
07510-002
Figure 21. XOUT Increases with Acceleration in the Positive X-Axis Direction
OPERATING VOLTAGES OTHER THAN 5 V
The ADXL001 is specified at VS = 3.3 V and VS = 5 V. Note that
some performance parameters change as the voltage is varied.
In particular, the XOUT output exhibits ratiometric offset and
sensitivity with supply. The output sensitivity (or scale factor) scales
proportionally to the supply voltage. At VS = 3.3 V, the output
sensitivity is typically 16 mV/g. At VS = 5 V, the output sensitivity
is nominally 24.2 mV/g. XOUT zero-g bias is nominally equal to
VS/2 at all supply voltages.
3.5
3.0
2.5
2.0
1.5
1.0
3.2 3.7 4.2 4.7 5.2 5.7
07510-016
ZERO-g BIAS ( V )
SUPPLY VOLTAGE ( V)
HIG H LI MIT
LOW LIMIT
NOMINAL ZERO-g
Figure 22. Typical Zero-g Bias Levels Across Varying Supply Voltages
Self-test response in gravity is roughly proportional to the cube
of the supply voltage. For example, the self-test response for the
ADXL001-70 at VS = 5 V is approximately 1.4 V. At VS = 3.3 V,
the self-test response for the ADXL001-70 is approximately
400 mV. To calculate the self-test value at any operating voltage
other than 3.3 V or 5 V, the following formula can be applied:
(STΔ @ VX) = (STΔ @ VS) × (VX/VS)3
where:
VX is the desired supply voltage.
VS is 3.3 V or 5 V.
ADXL001
Rev. A | Page 13 of 16
LAYOUT, GROUNDING, AND BYPASSING CONSIDERATIONS
CLOCK FREQUENCY SUPPLY RESPONSE
In any clocked system, power supply noise near the clock
frequency may have consequences at other frequencies. An
internal clock typically controls the sensor excitation and the
signal demodulator for micromachined accelerometers.
If the power supply contains high frequency spikes, they may be
demodulated and interpreted as acceleration signals. A signal
appears at the difference between the noise frequency and the
demodulator frequency. If the power supply noise is 100 Hz
away from the demodulator clock, there is an output term at
100 Hz. If the power supply clock is at exactly the same frequency
as the accelerometer clock, the term appears as an offset. If the
difference frequency is outside the signal bandwidth, the output
filter attenuates it. However, both the power supply clock and
the accelerometer clock may vary with time or temperature,
which can cause the interference signal to appear in the output
filter bandwidth.
The ADXL001 addresses this issue in two ways. First, the high
clock frequency, 125 kHz for the output stage, eases the task of
choosing a power supply clock frequency such that the difference
between it and the accelerometer clock remains well outside the
filter bandwidth. Second, the ADXL001 has a fully differential
signal path, including a pair of electrically isolated, mechanically
coupled sensors. The differential sensors eliminate most of the
power supply noise before it reaches the demodulator. Good
high frequency supply bypassing, such as a ceramic capacitor
close to the supply pins, also minimizes the amount of interference.
The clock frequency supply response (CFSR) is the ratio of the
response at the output to the noise on the power supply near the
accelerometer clock frequency or its harmonics. A CFSR of 0.9 V/V
means that the signal at the output is half the amplitude of the
supply noise. This is analogous to the power supply rejection
ratio (PSRR), except that the stimulus and the response are at
different frequencies.
POWER SUPPLY DECOUPLING
For most applications, a single 0.1 μF capacitor, CDC, adequately
decouples the accelerometer from noise on the power supply.
However, in some cases, particularly where noise is present at
the 1 MHz internal clock frequency (or any harmonic thereof),
noise on the supply can cause interference on the ADXL001
output. If additional decoupling is needed, a 50 Ω (or smaller)
resistor or ferrite bead can be inserted in the supply line.
Additionally, a larger bulk bypass capacitor (in the 1 μF to
4.7 μF range) can be added in parallel to CDC.
ELECTROMAGNETIC INTERFERENCE
The ADXL001 can be used in areas and applications with high
amounts of EMI or with components susceptible to EMI emissions.
The fully differential circuitry of the ADXL001 is designed to be
robust to such interference. For improved EMI performance,
especially in automotive applications, a 1000 pF output capacitor is
recommended on the XOUT output.
ADXL001
Rev. A | Page 14 of 16
OUTLINE DIMENSIONS
111808-C
BOTTOM VIEW
(PLA TING OPTIO N 1,
SEE DE TAIL A
FOR O P TION 2)
DETAIL A
(OPTION 2)
1
3
5
7
TOP VI E W
0.075 REF
R 0.008
(4 PLCS)
0.208
0.197 SQ
0.188 0.22
0.15
0.08
(R 4 PLCS)
0.183
0.177 S Q
0.171
0.094
0.078
0.062
0.010
0.006
0.002 0.082
0.070
0.058
0.055
0.050
0.045
0.031
0.025
0.019 0.030
0.020 DIA
0.010
0.019 SQ
0.108
0.100
0.092
R 0.008
(8 PLCS)
Figure 23. 8-Terminal Ceramic Leadless Chip Carrier [LCC]
(E-8-1)
Dimensions shown in inches
ORDERING GUIDE
Model1 Temperature Range g Range Package Description Package Option
ADXL001-70BEZ −40°C to +125°C ±70 g 8-Terminal LCC E-8-1
ADXL001-70BEZ-R7 −40°C to +125°C ±70 g 8-Terminal LCC E-8-1
ADXL001-250BEZ −40°C to +125°C ±250 g 8-Terminal LCC E-8-1
ADXL001-250BEZ-R7 −40°C to +125°C ±250 g 8-Terminal LCC E-8-1
ADXL001-500BEZ −40°C to +125°C ±500 g 8-Terminal LCC E-8-1
ADXL001-500BEZ-R7 −40°C to +125°C ±500 g 8-Terminal LCC E-8-1
EVAL-ADXL001-250Z Evaluation Board
EVAL-ADXL001-500Z Evaluation Board
EVAL-ADXL001-70Z Evaluation Board
1 Z = RoHS Compliant Part.
ADXL001
Rev. A | Page 15 of 16
NOTES
ADXL001
Rev. A | Page 16 of 16
NOTES
©2010 Analog Devices, Inc. All rights reserved. Trademarks and
registered trademarks are the property of their respective owners.
D07510-0-2/10(A)
